An-Chen Liu1, Hsin-Chu Chen2, Po-Tsung Tu1, 3,Sung-Jin Cho4, Andrew Newton4, Yung-Yu Lai5, Yan-Lin Chen6, Po-Chun Yeh3,Shu-Tong Chang6, and Hao-Chung Kuo1, 7, Fellow, IEEE
1Department of Photonics and Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University,
2Institute of Advanced Semiconductor Packaging and Testing, National Sun Yat-sen University
3Electronic and Optoelectronic System Research Laboratories, Industrial Technology Research Institute
4Oxford Instruments Plasma Technology
5Research Center for Applied Sciences, Academia Sinica
6Department of Electrical Engineering, National Chung Hsing University
7Semiconductor Research Center, Hon Hai Research Institute