Kai-Sheng Lin1,2, Yu-Ying Lin1, Guan-Han Lin1, Hsiang-Chao Yang1, Tsung-Te Chou2,
Chien-Wei Chen2, Chi-Chung Kei2, Fan-Yu Yen3, Wei-Yen Chen3, Feng-Ching Chu3,
Feng-Cheng Yang3 and Chun-Hsiung Lin1
1 National Yang Ming Chiao Tung University
2 National Center of Instrumentation Research
3 Taiwan Semiconductor Manufacturing Company