Monday, April 19, 1:30 PM~4:50 PM Ballroom A

Short Course A ： Advanced Processing for Future Nodes

• 
  1:30 PM~2:30 PM

  A-1 Logic CMOS scaling challenges – FEOL perspective
  

  Benjamin Colombeau, Applied Materials
  
• 
  2:40 PM~3:40 PM

  A-2 Back End of Line (BOEL) Processing and Cross Over to Packaging
  

  Andrew Kummel, University of California, San Diego
  
• 
  3:50 PM~4:50 PM

  A-3 Dry Etching of Advanced Semiconductor Devices with and without Plasma
  

  Thorsten Lill, Lam Research
  

Monday, April 19, 1:30 PM~4:50 PM Ballroom B

Short Course B ： AI-Devices to Systems

• 
  1:30 PM~3:00 PM

  B-1 AI-Devices to systems: Resistive Switching Materials and Devices for Bio-Inspired Computing
  

  Jianhua (Joshua) Yang, University of Southern California
  
• 
  3:20 PM~4:50 PM

  B-2 In-memory Computing Based on Emerging Nonvolatile Memories
  

  Yuchao Yang, Peking University
  楊玉超

PAGE CONTENTS

• -Short Course A :
   Advanced Processing for Future Nodes
• -Short Course B :
   AI-Devices to Systems