Tuesday, April 20, 12:50 PM~5:30 PM Ballroom C
T3 ： Poster Session

T3-1 A 500V SOI-LIGBT With Multiple Deep-Oxide Trenches For Fast Turn-OFF

Yongjiu Cui, Jie Ma, Long Zhang, Jing Zhu, Weifeng Sun, Xinyu Liu, Wangming Cui, and Zhixiang Zhou
Southeast University

View Biography
T3-2 Back-Gate Network Extraction Free from Dynamic Self-Heating in FD SOI

Lucas Nyssens, Martin Rack, Arka Halder, Martin Vanbrabant, Valeriya Kilchytska, and Jean-Pierre Raskin
Université catholique de Louvain

View Biography
T3-3 Suppressed Source-to-Drain Tunneling and Short-Channel Effects for MFIS-type InGaAs and Si Negative-Capacitance FinFETs

Shih-En Huang and Pin Su
National Chiao Tung University, Taiwan

View Biography
T3-4 Benchmarking the Performance of Heterogeneous Stacked RRAM with CFET-SRAM and MRAM for Deep Neural Network Application Amidst Variation and Noise

Parthasarathi Pal¹, Sunanda Thunder², Min-Jung Tsai¹, Po-Tsang Huang², and Yeong Her Wang¹
¹National Cheng Kung University
²National Chiao Tung University, Taiwan.

View Biography
T3-5 Transfer Characteristics of CMOS Inverter using “Steep SS PN-Body Tied SOI-FET”

Shota Ishiguro¹, Jiro Ida¹, Takayuki Mori¹, and Koichiro Ishibashi²
¹Kanazawa Institute of Technology
²The University of Electro-Communications

View Biography
T3-6 Analysis of Drain Current Enhancement in “PN-Body Tied SOI-FET”
-Bulk vs Surface Conduction Mode and Low Vds Saturation Effect-

Hiroki Ito¹, Jiro Ida¹, Takayuki Mori¹, and Koichiro Ishibashi²
¹Kanazawa Institute of Technology
²The University of Electro-Communications

View Biography
T3-7 Calculation of Field Dependent Mobility in MoS₂ and WS₂with Multi-Valley Monte Carlo Method

Pin-Fang Chen¹, Yuh-Renn Wu^1,2
¹National Taiwan University
²Industrial Technology Research Institute

View Biography
T3-8 Improved Switching Time in Negative Capacitance Junctionless Transistors

Manish Gupta and Vita Pi-Ho Hu
National Taiwan University

View Biography
T3-9 Machine Learning Approach to Predicting Tunnel Field-Effect Transistors

Chandni Akbar, Narasimhulu Thoti, and Yiming Li
National Yang Ming Chiao Tung University
T3-10 A precise debugging method and defect diagnosis with mass big-data analysis in the designed high-dense array for rapid yield improvement in a logic platform

Chan-Ching Lin¹, Shenzhi-Yang Lin², Ryan Liang¹, Chi-Pei Lu¹, Cheng-Shu Ho¹, Chieh Lo¹, Shao-Yu Hsu¹, Jim-Chen Chen¹, Fan Lan², Weiwei Pan², Sa Zhao², Yongjun Zheng², and Shou-Zen Chang¹
¹Powerchip Semiconductor Manufacturing Corp.
²Semitronix

View Biography
T3-11 A Novel Design of Ferroelectric Nanowire Tunnel Field Effect Transistors

Narasimhulu Thoti and Yiming Li
National Yang Ming Chiao Tung University

View Biography
T3-12 Ferroelectric Characterization in Ultrathin Hf_0.5Zr_0.5O₂ MFIS Capacitors by Piezoresponse Force Microscopy (PFM) in Vacuum

Cheng-Hung Wu¹, Artur Useinov¹, Tian-Li Wu¹, and Chun-Jung Su²
¹National Yang Ming Chiao Tung University
²Taiwan Semiconductor Research Institute

View Biography
T3-13 Selective Area Epitaxy of Axial Wurtzite -InAs Nanowire on InGaAs NW by MOCVD

Deepak Anandan, Edward Yi Chang, Hung Wei Yu, Hua Lun Ko, Venkatesan Nagarajan, and Sankalp Kumar Singh
National Chiao Tung University, Taiwan

View Biography
T3-14 Impact of Interfacial Layer on the Switching Characteristics of HZO-based Ferroelectric Tunnel Junction

Haolin Li, Pengying Chang, Gang Du, Jinfeng Kang, and Xiaoyan Liu
Peking University

View Biography
T3-15 Alleviation of Charge Trapping and Flicker Noise in HfZrO₂-Based Ferroelectric Capacitors by Thermal Engineering

Sourav De¹, Wei-Xuan Bu¹, Bo-Han Qiu¹, Chung-Jun Su², Yao-Jen Lee², and Darsen D. Lu¹
¹National Cheng Kung University
²Taiwan Semiconductor Research Institute

View Biography
T3-16 Improvement of Nanotwinned Copper Thermal Stability for High Temperature Heterogeneous Integration

Wei-Lan Chiu, Ying Tzu Hung, Ou-Hsiang Lee, Tsung Yu Ou-Yang, Hsiang-Hung Chang, and Wei-Chung Lo
Industrial Technology Research Institute

View Biography
T3-17 TCAD Validation of an Intercept-at-Zero-Gate-Length MOSFET Series Resistance Extraction Method

Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, and Toshiro Hiramoto
Institute of Industrial Science, The University of Tokyo

View Biography
T3-18 Design of a Low Power Approximate Adder based on Magnetic Tunnel Junction for Image Processing Applications

Kanika Monga, Nitin Chaturvedi, S Gurunarayanan
Birla Institute of Technology and Science

View Biography

Tuesday, April 20, 1:40 PM~3:20 PM Ballroom A
T1 ： Advanced CMOS Technology

1:40 PM~2:00 PM
T1-1 FinFET Plus: A Scalable FinFET Architecture with 3D Air-Gap and Air-Spacer Toward the 3nm Generation and Beyond

C. K. Chiang¹, H. Pai¹, J. L. Lin², J. K. Chang¹, M. Y. Lee¹, E. R. Hsieh², K. S. Li³, G. L. Luo³, Osbert Cheng⁴, and S. S. Chung¹
¹National Chiao Tung University, Taiwan
²National Central University
³Taiwan Semiconductor Research Institute
⁴United Microelectronics Corp

View Biography
2:00 PM~2:20 PM
T1-2 The First Ge Nanosheets GAAFET CMOS Inverters Fabricated by 2D Ge/Si Multilayer Epitaxy, Ge/Si Selective Etching

Chun-Lin Chu, Guang-Li Luo, Szu-Hung Chen, Wei-Yuan Chang, Wen-Fa Wu and Wen-Kuan Yeh
Taiwan Semiconductor Research Institute, National Applied Research Laboratories

View Biography
2:20 PM~2:40 PM
T1-3 Sub-60 mV/dec Germanium Nanowire Field-Effect Transistors with 2-nm-thick Ferroelectric Hf_0.5Zr_0.5O₂

Y.-W. Lin¹, T.-Y. Yu², C.-J. Su², Y.-N. Chen¹, H.-H. Chang¹, G.-L. Luo², C.-T. Wu², W.-F. Wu², K.-L. Lin², F.-J. Hou², Y.-C. Wu¹, and W.-K. Yeh²
¹National Tsing Hua University
²Taiwan Semiconductor Research Institute

View Biography
2:40 PM~3:00 PM
T1-4 The Powerful Methods of Flicker Noise Improvement in 22nm Technology

Achilles Fang, Jen Wei Pan, Widson Wu, Sheng Cho, Wei Jun Chen, Jia Bin Yeh, Zhi Cheng Lee, You Ren Liu, Kai Lin Lee, Leonard Chen, Vincent Hsueh, S .W. Hsieh, Ta Kang Lo, Jakent Pai, Daniel Chen, Yao Chin Cheng, Steven Hsu, Osbert Cheng, and G. C. Hung
United Microelectronics Corp.

View Biography
3:00 PM~3:20 PM
T1-5 Si Cryo-CMOS and Quantum Dots for Quantum Computing Applications

Yu-Jui Wu¹, Chih-Ying Chiang¹, Hung-Yu Tsao¹, Min-Jui Lin¹, Pu-Jia Hsieh¹, Ching-Chen Yeh¹, Wei-Ren Syong¹, Kai-Syang Hsu¹, Chi-Te Liang¹, Jeng-Chung Chen², and Jiun-Yun Li^1,3
¹National Taiwan University
²National Tsing-Hua University
³Taiwan Semiconductor Research Institute, National Applied Research Laboratories

View Biography

Tuesday, April 20, 1:40 PM~3:55 PM Mezzanine A+B
T4 ： Non-Volatile Memories

1:40 PM~2:15 PM
T4-1 The Pursuit of Atomistic Switching and Cross Point Memory (Invited)

DerChang Kau, Intel

View Biography
2:15 PM~2:35 PM
T4-2 An 8kb Spin-Orbit-Torque Magnetic Random-Access Memory

Guan-Long Chen¹, I-Jung Wang¹, Po-Shao Yeh¹, Sih-Han Li¹, Shan-Yi Yang¹, Yu-Chen Hsin¹, Hsin-Tsun Wu¹, HsuMing Hsiao¹, Yao-Jen Chang¹, Kuan-Ming Chen^1,3, SK Ziaur Rahaman¹, Hsin-Han Lee¹, Yi-Hui Su¹, Fang-Ming Chen¹,
Jeng-Hua Wei¹, Shyh-Shyuan Sheu¹, Chih-I Wu^1,2, and Denny Tang¹
¹Industrial Technology Research Institute
²National Taiwan University
³National Chiao Tung University

View Biography
2:35 PM~2:55 PM
T4-3 Ultrahigh Spin-Orbit Torque Efficiency at Spin Reorientation Transition State in Pt/Co Multilayer

Fen Xue¹, Shy-Jay Lin², Mahendra DC¹, Chong Bi¹, Xiang Li¹, Wilman Tsai¹, and Shan X. Wang¹
¹Stanford University
²Taiwan Semiconductor Manufacturing Company, Taiwan

View Biography
2:55 PM~3:15 PM
T4-4 Multi-Bit Cryogenic Flash Memory on Si/SiGe and Ge/GeSi Heterostructures

Wei-Chih Hou¹, Nai-Wen Hsu¹, Hsiang-Shun Kao¹, and Jiun-Yun Li^{1, 2}
¹National Taiwan University
²Taiwan Semiconductor Research Institute

View Biography
3:15 PM~3:35 PM
T4-5 Bandgap-Engineered Tunneling Layer on Operation Characteristics of Poly-Ge Charge-Trapping Flash Memory Devices

Jung-En Tsai, Kuei-Shu Chang-Liao, and Hsin-Kai Fang
National Tsing Hua University

View Biography
3:35 PM~3:55 PM
T4-6 A Twin Bit AND-Type Multiple-Time-Programming Memory Cell by Nano-scaled High–k Metal Gate Process

Che-Wei Chu, Chrong Jung Lin, Ya-Chin King and Wei-Hua Chen
National Tsing Hua University

View Biography

Tuesday, April 20, 4:15 PM~5:55 PM Mezzanine A+B
T5 ： Oxide Transistors and BEOL/Process Technology

4:15 PM~4:35 PM
T5-1 BEOL Compatible Indium-Tin-Oxide Transistors: Switching of Ultra-High-Density 2D Electron Gas over 0.8×10¹⁴ /cm² by Ferroelectric Polarization

Mengwei Si, Zehao Lin, Junkang Li, Chang Niu, Xiao Lyu, Dongqi Zheng, and Peide D. Ye
Purdue University

View Biography
4:35 PM~4:55 PM
T5-2 Double-Layer Amorphous InGaZnO Thin Film Transistors with High Mobility and High Reliability

Song-Ling Li¹, Ming-Xuan Lee¹, Chia-Chun Yen¹, Tsang-Long Chen², Cheng-Hsu Chou², and C. W. Liu¹
¹National Taiwan University
²Innolux Corporation

View Biography
4:55 PM~5:15 PM
T5-3 Grain Structure – Resistivity Relationship of Ru ALD Precursors

Michael Breeden, Victor Wang, Francis Yu, and Andrew C. Kummel
University of California, San Diego

View Biography
5:15 PM~5:35 PM
T5-4 Asymmetry Low Temperature Cu-Polymer Hybrid Bonding with Au Passivation Layer

Ming-Wei Weng, Shan-Yu Mao, Demin Liu, Han-Wen Hu, Kuan-Neng Chen
National Chiao Tung University

View Biography
5:35 PM~5:55 PM
T5-5 On-Wafer Electronic Layer Detectors Array (ELDA) for e-beam Imaging in Advanced Lithographic Systems

Chien-Ping Wang¹, Burn Jeng Lin¹, Jiaw-Ren Shih¹, Yue-Der Chih², Jonathan Chang², Chrong Jung Lin¹, and Ya-Chin King¹
1National Tsing Hua University
2Taiwan Semiconductor Manufacturing Company

View Biography

Wednesday, April 21, 10:20 AM~11:40 AM Ballroom C
T7 ： Power and RF Devices

10:20 AM~10:40 AM
T7-1 High Voltage Gain 4H-SiC CMOS Technology Featuring LOCal Oxidation of SiC (LOCOSiC) Isolation and Balanced Gate Dielectric

Bing-Yue Tsui, Chia-Lung Hung, Ya-Ru Jhuang, Yi-Ting Huang, Jung-Chien Cheng, Fang-Hsin Lu, Yi-Ting Shih, Ya-Hsin Lee, Liang-Yu Chen, Fu-Hsiang Chuang, and Pei-Wen Li
National Chiao Tung University

View Biography
10:40 AM~11:00 AM
T7-2 CMOS-Compatible GaN HEMT on 200mm Si-Substrate for RF Application

Po-Chun Yeh¹, Po-Tsung Tu¹, Hsueh-Hsing Liu¹, Chien-Hua Hsu¹, Hsin-Yun Yang¹, Yi-Keng Fu¹, Li-Heng Lee¹, Pei-Jer Tzeng¹, Yuh-Renn Wu^1,2, Shyh-Shyuan Sheu¹, Wei-Chung Lo¹, and Chih-I Wu^1,2
¹Industrial Technology Research Institute
²National Taiwan University

View Biography
11:00 AM~11:20 AM
T7-3 Superior High-Frequency Performance of T-Gated Poly-Si TFTs

Y. A. Huang¹, C.Y. Liang¹, K. P. Peng¹, H. C. Lin¹, P. W. Li¹, K. M. Chen², and G. W. Huang²

¹National Chiao Tung University, Taiwan

²Taiwan Semiconductor Research Institute

View Biography
11:20 AM~11:40 AM
T7-4 FD-SOI mm-Wave Differential Single-Pole Switches with Ultra-High Isolation

Martin Rack¹, Lucas Nyssens¹, Sidina Wane², Damienne Bajon², Dimitri Lederer¹, and Jean-Pierre Raskin^1

1Université catholique de Louvain

²eV-Technologies

View Biography

Thursday, April 22, 10:20 AM~12:35 PM Ballroom A
T10 ： Ferroelectric FETs and Memories

10:20 AM~10:55 AM
T10-1 Ferroelectric and Antiferroelectric Hf/Zr Oxide Films: Past, Present and Future (Invited)

Dina Triyoso, Tokyo Electron Technology Center, America, LLC

View Biography
10:55 AM~11:15 AM
T10-2 Current Percolation Path Impacting Switching Behavior of Ferroelectric FETs

Franz Müller¹, Maximilian Lederer¹, Ricardo Olivo¹, Tarek Ali¹, Raik Hoffmann¹, Halid Mulaosmanovic², Sven Beyer³, Stefan Dünkel³, Johannes Müller³, Stefan Müller⁴, Konrad Seidel¹, and Gerald Gerlach⁵
1Fraunhofer IPMS-CNT
2NaMLab gGmbH
3GLOBALFOUNDRIES
4Ferroelectric Memory GmbH
5Technische Universität Dresden

View Biography
11:15 AM~11:35 AM
T10-3 DFT Models of Ferroelectric Hafnium-Zirconium Oxide Stacks With and Without Dielectric Interlayers

Kisung Chae^1,2, Andrew Kummel¹, Kyeongjae Cho²
¹University of California San Diego
²The University of Texas at Dallas

View Biography
11:35 AM~11:55 AM
T10-4 Ultra-thin Hf_0.5Zr_0.5O₂ Ferroelectric Tunnel Junction with High Current Density

Yueh-Hua Chu¹, Hsin-Hui Huang¹, Yu-Hao Chen¹, Chien-Hua Hsu², Pei-Jer Tzeng², Shyh-Shyuan Sheu², Wei-Chung Lo², Chih-I Wu^2,3, and Tuo-Hung Hou^1,2
¹National Chiao Tung University, Taiwan
²Industrial Technology Research Institute
³National Taiwan University

View Biography
11:55 AM~12:15 PM
T10-5 Three-dimensional (3D) Non-volatile SRAM with IWO Transistor and HZO Ferroelectric Capacitor

Yuan-Chun Luo¹, Suman Datta², Shimeng Yu¹
¹Georgia Institute of Technology
²University of Notre Dame

View Biography
12:15 PM~12:35 PM
T10-6 Comparison of 2-T FeFET Nonvolatile Memory Cells: Gate Select vs. Drain Select

Bo-Kai Huang, Wei-Xiang You, and Pin Su
National Chiao Tung University, Taiwan

View Biography

PAGE CONTENTS

-T3 :
Poster Session
-T1 :
Advanced CMOS Technology
-T4 :
Non-Volatile Memories
-T5 :
Oxide Transistors and BEOL/Process Technology
-T7 :
Power and RF Devices
-T10 :
Ferroelectric FETs and Memories

Top

Tuesday, April 20, 12:50 PM~5:30 PM Ballroom C T3 ： Poster Session

Yongjiu Cui, Jie Ma, Long Zhang, Jing Zhu, Weifeng Sun, Xinyu Liu, Wangming Cui, and Zhixiang ZhouSoutheast University

Lucas Nyssens, Martin Rack, Arka Halder, Martin Vanbrabant, Valeriya Kilchytska, and Jean-Pierre RaskinUniversité catholique de Louvain

Shih-En Huang and Pin SuNational Chiao Tung University, Taiwan

Parthasarathi Pal1, Sunanda Thunder2, Min-Jung Tsai1, Po-Tsang Huang2, and Yeong Her Wang11National Cheng Kung University2National Chiao Tung University, Taiwan.

Shota Ishiguro1, Jiro Ida1, Takayuki Mori1, and Koichiro Ishibashi21Kanazawa Institute of Technology2The University of Electro-Communications

Hiroki Ito1, Jiro Ida1, Takayuki Mori1, and Koichiro Ishibashi2 1Kanazawa Institute of Technology 2The University of Electro-Communications

Pin-Fang Chen1, Yuh-Renn Wu1,2 1National Taiwan University 2Industrial Technology Research Institute

Manish Gupta and Vita Pi-Ho HuNational Taiwan University

Chandni Akbar, Narasimhulu Thoti, and Yiming LiNational Yang Ming Chiao Tung University

Chan-Ching Lin1, Shenzhi-Yang Lin2, Ryan Liang1, Chi-Pei Lu1, Cheng-Shu Ho1, Chieh Lo1, Shao-Yu Hsu1, Jim-Chen Chen1, Fan Lan2, Weiwei Pan2, Sa Zhao2, Yongjun Zheng2, and Shou-Zen Chang1 1Powerchip Semiconductor Manufacturing Corp. 2Semitronix

Narasimhulu Thoti and Yiming LiNational Yang Ming Chiao Tung University

Cheng-Hung Wu1, Artur Useinov1, Tian-Li Wu1, and Chun-Jung Su21National Yang Ming Chiao Tung University2Taiwan Semiconductor Research Institute

Deepak Anandan, Edward Yi Chang, Hung Wei Yu, Hua Lun Ko, Venkatesan Nagarajan, and Sankalp Kumar SinghNational Chiao Tung University, Taiwan

Haolin Li, Pengying Chang, Gang Du, Jinfeng Kang, and Xiaoyan LiuPeking University

Sourav De1, Wei-Xuan Bu1, Bo-Han Qiu1, Chung-Jun Su2, Yao-Jen Lee2, and Darsen D. Lu11National Cheng Kung University2Taiwan Semiconductor Research Institute

Wei-Lan Chiu, Ying Tzu Hung, Ou-Hsiang Lee, Tsung Yu Ou-Yang, Hsiang-Hung Chang, and Wei-Chung LoIndustrial Technology Research Institute

Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, and Toshiro Hiramoto Institute of Industrial Science, The University of Tokyo

Kanika Monga, Nitin Chaturvedi, S GurunarayananBirla Institute of Technology and Science

Tuesday, April 20, 1:40 PM~3:20 PM Ballroom A T1 ： Advanced CMOS Technology

C. K. Chiang1, H. Pai1, J. L. Lin2, J. K. Chang1, M. Y. Lee1, E. R. Hsieh2, K. S. Li3, G. L. Luo3, Osbert Cheng4, and S. S. Chung1 1National Chiao Tung University, Taiwan 2National Central University 3Taiwan Semiconductor Research Institute 4United Microelectronics Corp

Chun-Lin Chu, Guang-Li Luo, Szu-Hung Chen, Wei-Yuan Chang, Wen-Fa Wu and Wen-Kuan Yeh Taiwan Semiconductor Research Institute, National Applied Research Laboratories

Y.-W. Lin1, T.-Y. Yu2, C.-J. Su2, Y.-N. Chen1, H.-H. Chang1, G.-L. Luo2, C.-T. Wu2, W.-F. Wu2, K.-L. Lin2, F.-J. Hou2, Y.-C. Wu1, and W.-K. Yeh2 1National Tsing Hua University 2Taiwan Semiconductor Research Institute

Achilles Fang, Jen Wei Pan, Widson Wu, Sheng Cho, Wei Jun Chen, Jia Bin Yeh, Zhi Cheng Lee, You Ren Liu, Kai Lin Lee, Leonard Chen, Vincent Hsueh, S .W. Hsieh, Ta Kang Lo, Jakent Pai, Daniel Chen, Yao Chin Cheng, Steven Hsu, Osbert Cheng, and G. C. HungUnited Microelectronics Corp.

Tuesday, April 20, 1:40 PM~3:55 PM Mezzanine A+B T4 ： Non-Volatile Memories

DerChang Kau, Intel

Fen Xue1, Shy-Jay Lin2, Mahendra DC1, Chong Bi1, Xiang Li1, Wilman Tsai1, and Shan X. Wang11Stanford University2Taiwan Semiconductor Manufacturing Company, Taiwan

Wei-Chih Hou1, Nai-Wen Hsu1, Hsiang-Shun Kao1, and Jiun-Yun Li1, 21National Taiwan University2Taiwan Semiconductor Research Institute

Jung-En Tsai, Kuei-Shu Chang-Liao, and Hsin-Kai FangNational Tsing Hua University

Che-Wei Chu, Chrong Jung Lin, Ya-Chin King and Wei-Hua ChenNational Tsing Hua University

Tuesday, April 20, 4:15 PM~5:55 PM Mezzanine A+B T5 ： Oxide Transistors and BEOL/Process Technology

Mengwei Si, Zehao Lin, Junkang Li, Chang Niu, Xiao Lyu, Dongqi Zheng, and Peide D. YePurdue University

Song-Ling Li1, Ming-Xuan Lee1, Chia-Chun Yen1, Tsang-Long Chen2, Cheng-Hsu Chou2, and C. W. Liu11National Taiwan University2Innolux Corporation

Michael Breeden, Victor Wang, Francis Yu, and Andrew C. KummelUniversity of California, San Diego

Ming-Wei Weng, Shan-Yu Mao, Demin Liu, Han-Wen Hu, Kuan-Neng ChenNational Chiao Tung University

Chien-Ping Wang1, Burn Jeng Lin1, Jiaw-Ren Shih1, Yue-Der Chih2, Jonathan Chang2, Chrong Jung Lin1, and Ya-Chin King11National Tsing Hua University2Taiwan Semiconductor Manufacturing Company

Wednesday, April 21, 10:20 AM~11:40 AM Ballroom C T7 ： Power and RF Devices

Bing-Yue Tsui, Chia-Lung Hung, Ya-Ru Jhuang, Yi-Ting Huang, Jung-Chien Cheng, Fang-Hsin Lu, Yi-Ting Shih, Ya-Hsin Lee, Liang-Yu Chen, Fu-Hsiang Chuang, and Pei-Wen Li National Chiao Tung University

Po-Chun Yeh1, Po-Tsung Tu1, Hsueh-Hsing Liu1, Chien-Hua Hsu1, Hsin-Yun Yang1, Yi-Keng Fu1, Li-Heng Lee1, Pei-Jer Tzeng1, Yuh-Renn Wu1,2, Shyh-Shyuan Sheu1, Wei-Chung Lo1, and Chih-I Wu1,2 1Industrial Technology Research Institute 2National Taiwan University

Y. A. Huang1, C.Y. Liang1, K. P. Peng1, H. C. Lin1, P. W. Li1, K. M. Chen2, and G. W. Huang2 1National Chiao Tung University, Taiwan 2Taiwan Semiconductor Research Institute

Martin Rack1, Lucas Nyssens1, Sidina Wane2, Damienne Bajon2, Dimitri Lederer1, and Jean-Pierre Raskin1 1Université catholique de Louvain 2eV-Technologies

Thursday, April 22, 10:20 AM~12:35 PM Ballroom A T10 ： Ferroelectric FETs and Memories

Dina Triyoso, Tokyo Electron Technology Center, America, LLC

Kisung Chae1,2, Andrew Kummel1, Kyeongjae Cho2 1University of California San Diego 2The University of Texas at Dallas

Yueh-Hua Chu1, Hsin-Hui Huang1, Yu-Hao Chen1, Chien-Hua Hsu2, Pei-Jer Tzeng2, Shyh-Shyuan Sheu2, Wei-Chung Lo2, Chih-I Wu2,3, and Tuo-Hung Hou1,21National Chiao Tung University, Taiwan2Industrial Technology Research Institute3National Taiwan University

Yuan-Chun Luo1, Suman Datta2, Shimeng Yu1 1Georgia Institute of Technology 2University of Notre Dame

Bo-Kai Huang, Wei-Xiang You, and Pin SuNational Chiao Tung University, Taiwan

PAGE CONTENTS

Tuesday, April 20, 12:50 PM~5:30 PM Ballroom C
T3 ： Poster Session

Yongjiu Cui, Jie Ma, Long Zhang, Jing Zhu, Weifeng Sun, Xinyu Liu, Wangming Cui, and Zhixiang Zhou
Southeast University

Lucas Nyssens, Martin Rack, Arka Halder, Martin Vanbrabant, Valeriya Kilchytska, and Jean-Pierre Raskin
Université catholique de Louvain

Shih-En Huang and Pin Su
National Chiao Tung University, Taiwan

Parthasarathi Pal¹, Sunanda Thunder², Min-Jung Tsai¹, Po-Tsang Huang², and Yeong Her Wang¹
¹National Cheng Kung University
²National Chiao Tung University, Taiwan.

Shota Ishiguro¹, Jiro Ida¹, Takayuki Mori¹, and Koichiro Ishibashi²
¹Kanazawa Institute of Technology
²The University of Electro-Communications

Hiroki Ito¹, Jiro Ida¹, Takayuki Mori¹, and Koichiro Ishibashi²
¹Kanazawa Institute of Technology
²The University of Electro-Communications

Pin-Fang Chen¹, Yuh-Renn Wu^1,2
¹National Taiwan University
²Industrial Technology Research Institute

Manish Gupta and Vita Pi-Ho Hu
National Taiwan University

Chandni Akbar, Narasimhulu Thoti, and Yiming Li
National Yang Ming Chiao Tung University

Chan-Ching Lin¹, Shenzhi-Yang Lin², Ryan Liang¹, Chi-Pei Lu¹, Cheng-Shu Ho¹, Chieh Lo¹, Shao-Yu Hsu¹, Jim-Chen Chen¹, Fan Lan², Weiwei Pan², Sa Zhao², Yongjun Zheng², and Shou-Zen Chang¹
¹Powerchip Semiconductor Manufacturing Corp.
²Semitronix

Narasimhulu Thoti and Yiming Li
National Yang Ming Chiao Tung University

Cheng-Hung Wu¹, Artur Useinov¹, Tian-Li Wu¹, and Chun-Jung Su²
¹National Yang Ming Chiao Tung University
²Taiwan Semiconductor Research Institute

Deepak Anandan, Edward Yi Chang, Hung Wei Yu, Hua Lun Ko, Venkatesan Nagarajan, and Sankalp Kumar Singh
National Chiao Tung University, Taiwan

Haolin Li, Pengying Chang, Gang Du, Jinfeng Kang, and Xiaoyan Liu
Peking University

Sourav De¹, Wei-Xuan Bu¹, Bo-Han Qiu¹, Chung-Jun Su², Yao-Jen Lee², and Darsen D. Lu¹
¹National Cheng Kung University
²Taiwan Semiconductor Research Institute

Wei-Lan Chiu, Ying Tzu Hung, Ou-Hsiang Lee, Tsung Yu Ou-Yang, Hsiang-Hung Chang, and Wei-Chung Lo
Industrial Technology Research Institute

Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, and Toshiro Hiramoto
Institute of Industrial Science, The University of Tokyo

Kanika Monga, Nitin Chaturvedi, S Gurunarayanan
Birla Institute of Technology and Science

Tuesday, April 20, 1:40 PM~3:20 PM Ballroom A
T1 ： Advanced CMOS Technology

C. K. Chiang¹, H. Pai¹, J. L. Lin², J. K. Chang¹, M. Y. Lee¹, E. R. Hsieh², K. S. Li³, G. L. Luo³, Osbert Cheng⁴, and S. S. Chung¹
¹National Chiao Tung University, Taiwan
²National Central University
³Taiwan Semiconductor Research Institute
⁴United Microelectronics Corp

Chun-Lin Chu, Guang-Li Luo, Szu-Hung Chen, Wei-Yuan Chang, Wen-Fa Wu and Wen-Kuan Yeh
Taiwan Semiconductor Research Institute, National Applied Research Laboratories

Y.-W. Lin¹, T.-Y. Yu², C.-J. Su², Y.-N. Chen¹, H.-H. Chang¹, G.-L. Luo², C.-T. Wu², W.-F. Wu², K.-L. Lin², F.-J. Hou², Y.-C. Wu¹, and W.-K. Yeh²
¹National Tsing Hua University
²Taiwan Semiconductor Research Institute

Achilles Fang, Jen Wei Pan, Widson Wu, Sheng Cho, Wei Jun Chen, Jia Bin Yeh, Zhi Cheng Lee, You Ren Liu, Kai Lin Lee, Leonard Chen, Vincent Hsueh, S .W. Hsieh, Ta Kang Lo, Jakent Pai, Daniel Chen, Yao Chin Cheng, Steven Hsu, Osbert Cheng, and G. C. Hung
United Microelectronics Corp.

Tuesday, April 20, 1:40 PM~3:55 PM Mezzanine A+B
T4 ： Non-Volatile Memories

Fen Xue¹, Shy-Jay Lin², Mahendra DC¹, Chong Bi¹, Xiang Li¹, Wilman Tsai¹, and Shan X. Wang¹
¹Stanford University
²Taiwan Semiconductor Manufacturing Company, Taiwan

Wei-Chih Hou¹, Nai-Wen Hsu¹, Hsiang-Shun Kao¹, and Jiun-Yun Li^{1, 2}
¹National Taiwan University
²Taiwan Semiconductor Research Institute

Jung-En Tsai, Kuei-Shu Chang-Liao, and Hsin-Kai Fang
National Tsing Hua University

Che-Wei Chu, Chrong Jung Lin, Ya-Chin King and Wei-Hua Chen
National Tsing Hua University

Tuesday, April 20, 4:15 PM~5:55 PM Mezzanine A+B
T5 ： Oxide Transistors and BEOL/Process Technology

Mengwei Si, Zehao Lin, Junkang Li, Chang Niu, Xiao Lyu, Dongqi Zheng, and Peide D. Ye
Purdue University

Song-Ling Li¹, Ming-Xuan Lee¹, Chia-Chun Yen¹, Tsang-Long Chen², Cheng-Hsu Chou², and C. W. Liu¹
¹National Taiwan University
²Innolux Corporation

Michael Breeden, Victor Wang, Francis Yu, and Andrew C. Kummel
University of California, San Diego

Ming-Wei Weng, Shan-Yu Mao, Demin Liu, Han-Wen Hu, Kuan-Neng Chen
National Chiao Tung University

Chien-Ping Wang¹, Burn Jeng Lin¹, Jiaw-Ren Shih¹, Yue-Der Chih², Jonathan Chang², Chrong Jung Lin¹, and Ya-Chin King¹
1National Tsing Hua University
2Taiwan Semiconductor Manufacturing Company

Wednesday, April 21, 10:20 AM~11:40 AM Ballroom C
T7 ： Power and RF Devices

Bing-Yue Tsui, Chia-Lung Hung, Ya-Ru Jhuang, Yi-Ting Huang, Jung-Chien Cheng, Fang-Hsin Lu, Yi-Ting Shih, Ya-Hsin Lee, Liang-Yu Chen, Fu-Hsiang Chuang, and Pei-Wen Li
National Chiao Tung University

Po-Chun Yeh¹, Po-Tsung Tu¹, Hsueh-Hsing Liu¹, Chien-Hua Hsu¹, Hsin-Yun Yang¹, Yi-Keng Fu¹, Li-Heng Lee¹, Pei-Jer Tzeng¹, Yuh-Renn Wu^1,2, Shyh-Shyuan Sheu¹, Wei-Chung Lo¹, and Chih-I Wu^1,2
¹Industrial Technology Research Institute
²National Taiwan University

Y. A. Huang¹, C.Y. Liang¹, K. P. Peng¹, H. C. Lin¹, P. W. Li¹, K. M. Chen², and G. W. Huang²

¹National Chiao Tung University, Taiwan

²Taiwan Semiconductor Research Institute

Martin Rack¹, Lucas Nyssens¹, Sidina Wane², Damienne Bajon², Dimitri Lederer¹, and Jean-Pierre Raskin^1

1Université catholique de Louvain

²eV-Technologies

Thursday, April 22, 10:20 AM~12:35 PM Ballroom A
T10 ： Ferroelectric FETs and Memories

Kisung Chae^1,2, Andrew Kummel¹, Kyeongjae Cho²
¹University of California San Diego
²The University of Texas at Dallas

Yueh-Hua Chu¹, Hsin-Hui Huang¹, Yu-Hao Chen¹, Chien-Hua Hsu², Pei-Jer Tzeng², Shyh-Shyuan Sheu², Wei-Chung Lo², Chih-I Wu^2,3, and Tuo-Hung Hou^1,2
¹National Chiao Tung University, Taiwan
²Industrial Technology Research Institute
³National Taiwan University

Yuan-Chun Luo¹, Suman Datta², Shimeng Yu¹
¹Georgia Institute of Technology
²University of Notre Dame

Bo-Kai Huang, Wei-Xiang You, and Pin Su
National Chiao Tung University, Taiwan