Scope of Papers

   The scope of papers requested in 2019 VLSI-TSA includes the following fields :

  •  Low power CMOS and embedded memory
• Foundry technology

• RF & THz process, device and integration technology
• Standalone memory: DRAM, FLASH, emerging memory technology

• Advanced process modules: e.g. gate stack, junction, strain/channel engineering, low-R
contact, low-C spacer/ILD,

interconnect technology, ALE and selective deposition, etc.

• Nanopatterning: Multiple patterning, Directed Self-Assembly, EUV, etc.
• Power and analog IC device and technology
• Advanced CMOS process and devices: Ge, SiGe, III-V, FinFET, GAA, 2D materials/1D
nanowires
• Material, process and device modeling
• TFT and organic electronics
• MEMS, imagers and sensors
• Advanced manufacturing technology, metrology and yield

• Reliability physics, characterization and test

• Advanced packaging and 2.5D/3D Integration

• Photonics and Beyond CMOS Technology
• Energy harvesting technology

• Wearable and loE enabling technologies

• Neuromorphic devices and materials for brain-inspired computing

• Quantum phenomena and information technologies

• Device technologies for deep learning applications