Monday, April 24, 1:30 PM~4:50 PM Ballroom A
TSA Short Course A CMOS Technology Beyond Silicon

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    A-1 Materials and Process Fundamentals for High Performance Ge MOSFETs
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    A-2 III-V Channel Transistors
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    A-3 Steep Subthreshold Swing Transistors

Monday, April 24, 1:30 PM~4:50 PM Ballroom B
TSA Short Course B Metrology Challenges and Solutions for Advanced Technology Manufacturing

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    B-1 Critical Dimension measurement and control in EUV lithography era
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    B-2 Optical CD Metrology Challenges and Solutions for Advanced Technology Manufacturing

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