Monday, April 24, 1:30 PM~4:50 PM Ballroom A

TSA Short Course A ： CMOS Technology Beyond Silicon

• 
  A-1 Materials and Process Fundamentals for High Performance Ge MOSFETs
  

  Prof. Akira Toriumi

  The University of Tokyo, Japan 

• 
  A-2 III-V Channel Transistors
  

  Prof. Jesús A. del Alamo

  Massachusetts Institute of Technology, USA 

• 
  A-3 Steep Subthreshold Swing Transistors
  

  Prof. Alan Seabaugh

  University of Notre Dame, USA 

Monday, April 24, 1:30 PM~4:50 PM Ballroom B

TSA Short Course B ： Metrology Challenges and Solutions for Advanced Technology Manufacturing

• 
  B-1 Critical Dimension measurement and control in EUV lithography era
  

  Dr. Hiroshi Fukuda

  Hitachi High-Technologies Corporation, Japan 

• 
  B-2 Optical CD Metrology Challenges and Solutions for Advanced Technology Manufacturing
  

  Dr. Igor Turovets

  Nova Measuring Instruments, Israel  

PAGE CONTENTS

• -TSA Short Course A :
   CMOS Technology Beyond Silicon
• -TSA Short Course B :
   Metrology Challenges and Solutions for Advanced Technology Manufacturing