TSA Short Course 1 ： Advanced Process Technology (ALD/ ALE)

1:30 PM~3:00 PM,Wednesday , April 27 Ballroom A

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  1-1 Atomic Layer Deposition for Nanoelectronic Devices
  

  1:30 PM~3:00 PM,Wednesday , April 27

  Prof. Paul C. McIntyre

  Stanford University, USA

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  1-2 Atomic Layer Etching to Enable 7nm Technology Node and Beyond
  

  Wednesday , April 27

  Dr. Alok Ranjan

  TEL Technology Center, America, LLC, USA

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TSA Short Course 2 ： Power Electronics

3:20 PM~4:50 PM,Wednesday , April 27

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  2-1 High Voltage Power Device Technologies : Si and Wide Bandgap Semiconductors
  

  Wednesday , April 27

  Prof. T. Paul Chow

  Rensselaer Polytechnic Institute, USA

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PAGE CONTENTS

• -TSA Short Course 1 :
   Advanced Process Technology (ALD/ ALE)
• -TSA Short Course 2 :
   Power Electronics