Wednesday, April 27, 1:30 PM~3:00 PM Ballroom A
TSA Short Course 1 Advanced Process Technology (ALD/ ALE)

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    1-2 Atomic Layer Etching to Enable 7nm Technology Node and Beyond
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    1:30 PM~3:00 PM
    1-1 Atomic Layer Deposition for Nanoelectronic Devices

Wednesday, April 27, 3:20 PM~4:50 PM
TSA Short Course 2 Power Electronics

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    2-1 High Voltage Power Device Technologies : Si and Wide Bandgap Semiconductors