TSA Short Course 1 Advanced Process Technology (ALD/ ALE)

1:30 PM~3:00 PM,Wednesday , April 27 Ballroom A
  • the photo of Speaker
    1-1 Atomic Layer Deposition for Nanoelectronic Devices
    1:30 PM~3:00 PM,Wednesday , April 27
    Prof. Paul C. McIntyre
    Stanford University, USA
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    1-2 Atomic Layer Etching to Enable 7nm Technology Node and Beyond
    Wednesday , April 27
    Dr. Alok Ranjan
    TEL Technology Center, America, LLC, USA

TSA Short Course 2 Power Electronics

3:20 PM~4:50 PM,Wednesday , April 27
  • the photo of Speaker
    2-1 High Voltage Power Device Technologies : Si and Wide Bandgap Semiconductors
    Wednesday , April 27
    Prof. T. Paul Chow
    Rensselaer Polytechnic Institute, USA