Scope of Papers

The scope of papers (TSA domain) requested in 2023 International VLSI Symposium on Technology, Systems and Applicationsincludes the following fields : 

l   Front-end CMOS and foundry technology

l   Standalone memory: DRAM, FLASH, emerging memory technology

l  Ultra-low power CMOS and embedded memory

l   Advanced process modules: e.g. gate stack, junction, strain/channel engineering, low-R contact, low-C pacer/ILD, interconnect technology, ALE and selective deposition, etc.

l   Nano-patterning: multiple patterning, directed self-Assembly, EUV, etc.

l   Power and analog IC device and technology

l   Advanced CMOS process and devices: Ge, SiGe, III-V, FinFET, GAAFET, low-dimensional materials and devices, 2D and nanowire devices 

l  BEOL compatible devices for 3D integration

l  Material, process and device modeling 

l  Reliability physics, characterization and measurements

l  Advanced packaging and 2.5D/3D Integration

l  TFT and organic electronics

l  MEMS, imagers and sensors

l  Power and analog IC devices and technology

l  Photonics and beyond CMOS technology

l  RF & THz process, device and integration technology

l  Energy harvesting technology

l  Wearable and loE enabling technologies

l  Quantum phenomena and information technologies

l  Neuromorphic devices and materials for brain-inspired computing

l  Device/circuit technologies for AI deep learning applications

l  Advanced manufacturing technology, metrology and yield