TSA Short Course A CMOS Technology Beyond Silicon

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    A-1 Materials and Process Fundamentals for High Performance Ge MOSFETs
    Prof. Akira Toriumi
    The University of Tokyo, Japan 
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    A-2 III-V Channel Transistors
    Prof. Jesús A. del Alamo
    Massachusetts Institute of Technology, USA 
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    A-3 Steep Subthreshold Swing Transistors
    Prof. Alan Seabaugh
    University of Notre Dame, USA 

TSA Short Course B Metrology Challenges and Solutions for Advanced Technology Manufacturing

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    B-1 Critical Dimension measurement and control in EUV lithography era
    Dr. Hiroshi Fukuda
    Hitachi High-Technologies Corporation, Japan 
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    B-2 Optical CD Metrology Challenges and Solutions for Advanced Technology Manufacturing
    Dr. Igor Turovets
    Nova Measuring Instruments, Israel  

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